Silicon processing for the VLSI era

by Stanley Wolf

Publisher: Lattice Press in Sunset Beach, Calif

Written in English
Cover of: Silicon processing for the VLSI era | Stanley Wolf
Published: Downloads: 725
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Subjects:

  • Semiconductors -- Etching.,
  • Integrated circuits -- Very large scale integration.,
  • Silicon.
  • Edition Notes

    Includes bibliographies and indexes.

    StatementStanley Wolf, Richard N. Tauber.
    ContributionsTauber, Richard N.
    Classifications
    LC ClassificationsTK7874 .W635 1986
    The Physical Object
    Pagination3 v. :
    ID Numbers
    Open LibraryOL2748505M
    ISBN 100961672137, 0961672145
    LC Control Number86081923

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